The design of the Planar ServoRing rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. Planar ServoRing stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery.
Brushless Direct Drive maximizes positioning performance of the Planar ServoRing by utilizing three phase planar brushless motor technology. “Lo-Cog” magnetic design assures smooth rotation and dynamic performance.
Performance is assured with 18,000 lines encoder that results in 0.1 arc-sec positioning resolution. The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make Planar ServoRing.
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